Precision Cleaning Business Unit
Information and communications technology (ICT) has been developing at a dizzying pace during the digital and networking age of the 21st century, and manufacturing technology has been making rapid progress in areas such as semiconductors and flat-panel displays.
Taiwan Mitsubishi Chemical's precision cleaning technology removes micron- to nano-scale contaminants that are invisible to the naked eye (such as particles and metals) in a fine-grained manner.
Going forward, we remain committed to utilizing advanced precision cleaning and surface modification technologies to help customers increase yields and lower costs.
Taiwan Mitsubishi Chemical's washing technology removes minuscule particles from part surfaces so that they don’t become a source of dust.
We can remove the altered (fluoridated) layer from a ceramic-sprayed surface without changing its roughness to reduce particulate contamination.
We can remove the modified (fluoridated) layer from an aluminum surface to reduce particulate contamination. The altered layer on the inside of gas cavities can also be removed.
We can completely remove polishing material remaining after blast processing.
We can remove impurities (such as metals and particles) remaining on the surface of newly fabricated products to an extreme degree to provide high added value.
We can help improve product yields by reducing metal contamination to the parts-per-trillion (ppt) level, and we are able to analyze levels of contamination in-house.
Results of an analysis of an eluted metal after Si electrode washing
| Na | K | Ca | Mg | Al | Fe | Cr | Ni | Cu | Mn | Zn | Ti | Si | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| After washing by Taiwan Mitsubishi Chemical | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <10 | <10 |
| After washing by a competitor | 3 | 1 | 1 | 1 | twenty three | <1 | <1 | 26 | <1 | <1 | 1 | <10 | <10 |
| After washing by the manufacturer | 6 | 3 | 5 | <1 | <1 | 2 | <1 | <1 | <1 | <1 | 2 | <10 | <10 |
